China Vapor Deposition Process Furnace

Description
Vertical CVD?tube?furnace (Silicon Carbide) adopts methyltrichlorosilane (MTS) as air source to make material surface oxidation resistant coating and change characters of matrix material.

Technical Features
1. The most advance control technology is adopted to control flow and pressure of MTS, realizing stable deposition airflow and small pressure fluctuation range.
2. Vacuum chemical vapor deposition furnace uses special designed deposition chamber, which assures good sealing effect and great contamination protection performance.
3. Multiple deposition channels assure flow field uniformity, non-deposition dead corner and great deposition surface.
4. It has treatment for the high corrosive tail gas, flammable and explosive gas, solid dust and low melting point sticky materials during the deposition process.
5. The new design anti corrosion vacuum unit ensures long continuous working hours and short maintainence time.