Description
Vertical CVD furnace (Carbon) is used for composite material CVD that used hydrocarbon gas (like C3H8) as carbon sources. It works on CVD and CVI treatment for carbon materials.

Technical Features
1. Using different temperature control zones according to the working zone size, assuring great temperature uniformity.
2. The most advance control technology is adopted to control flow and pressure of MTS, realizing stable deposition airflow and small pressure fluctuation range.
3. The newly designed anti-corrosion vacuum unit ensures long continuous working period and low maintainence rate.
4. The vertical?vacuum carbon?tube?furnace uses special designed deposition chamber, which assures good sealing effect and great contamination protection performance.
5. Multiple deposition channels assure flow field uniformity, non-deposition dead corner and great deposition surface.
6. High corrosive tail gas, combustible and explosion gas, solid dust and low melting point product can be treated effectively in the process of deposition.