China CVD coating Machine

Description
Horizontal CVD tube furnace (Silicon Carbide) uses methyltrichlorosilane (MTS) as air source to make material surface oxidation resistant coating and change characters of matrix material.

Technical Features
1. High corrosive tail gas, combustible and explosion gas, solid dust and low melting point product can be treated effectively during deposition process.
2. Horizontal chemical vapor deposition furnace uses special designed deposition chamber, which assures good sealing effect and strong antipollution ability.
3. The most advance control technology is adopted to precise control the MTS flow and pressure , realizing stable deposition airflow and narrow pressure fluctuation range.
4. The new design anti corrosion vacuum unit ensures long continuous working period and low maintainence rate.
5. Multiple deposition channels achieve flow field uniformity, non-deposition dead corner and better deposition effect.
6.The furnace working zone size can reach 2.5m × 2.5m × 5m,it can satisfy supersize part CVD treatment.