SMIF Versaport, LPT, LPi, Indexer offers exceptional performance in the semiconductor industry. Designed for wafer handling, this unit supports a wafer size of 200mm and provides precise cassette positioning with an accuracy within ±0.005 inches vertically.

The SMIF-Pod load height is 900mm, while the nominal maximum reach of the load arm measures 307mm. It has a reversed cassette orientation height of 1578mm, with a width of 457mm and depth of 478mm, weighing 170 pounds (77.27kg) without additional components.

• Wafer Size: 200mm
  
• Cassette Pick-up Position: 909mm (35.8 inches) 
  
• Cassette Positioning: To within ±0.005 inches (vertical)
  
• SMIF-Pod Load Height: 900mm (35.5 inches)
  
• Nominal Maximum Reach of Load Arm: (Measured from front face of LPT to H-bar of SMIF-Pod) 307mm (12.10 inches)
  
• Reversed Cassette Orientation Height: 1578mm (62.13 inches) Width: 457mm (18.00 inches) Depth: 478mm (18.81 inches) Weight: (Without SMIF-Pod, cassette, wafers) 170 pounds(77.27kg)
  
• Speed of travel (Minienvironment): 57.2mm (2.25 inches)
  
• per second Mounting: Tool mount. May make use of an interface frame calibrated to lock the LPT into a repeatable position onto the Process Tool. Power: 3.5 Amp (100-120vac) 2 Amp (230vac) Laser
• NOTE:LPT is a Class I Laser product when used with a SMIF-Pod Diode Laser; Wavelength = 670 nm Laser Power = <1mW (Class II) Communications: Serial RS-232C (SECS I / SECS II), RS-485 (optional), Bi-directional Parallel LAN
  
• Transmission cycle<90s; Repositioning accuracy of 0.127mm; The cleanliness level is superior to Class 1;
  
• Direction error<0.2mm
  
• Mature and stable Interlock system
  
• Wafer Traceable Identification System SMART TAG
  
• Integrated self diagnosis and advanced diagnostic software for easy design and troubleshooting.

The LPT operates with a Class I Laser, featuring a wavelength of 670 nm and a power less than 1mW. It supports various communication interfaces including Serial RS-232C, RS-485, and Bi-directional Parallel LAN.