The EFEM/Sorter is a premier wafer transfer module designed for high-speed and reliable wafer handling. Manufactured by Honghu (Suzhou) Semiconductor Technology Co., Ltd, this equipment supports up to 320 wafers per hour with OCR reading and 1100 wafers per hour without OCR.

Its advanced technology ensures high performance and longevity, with a mean cycles before failure (MCBF) of 15,000,000 cycles.

• High Speed
  
• 320 WPH with OCR reading
  
• 1100 WPH without OCR reading
  
• High Reliability 
  
• Robot Global Top Share (Yaskawa,hirata,Tazmo)
  
• Key Components MCBF 15,000,000 cycles
  
• Super Clean
  
• Clean Class: ISO class1
  

The control technology and key components are all independently developed, achieving full localization. The equipment is equipped with wafer handling robots (ROBOT), fully automatic loading systems (Load port), SMIF, flip mechanisms, and fully automatic edge inspection aligners (PA) with visual OCR functions.

Through Honghu's patented multi-specification wafer transfer solution, the equipment can be compatible with various sizes such as 4/6/8/12, enabling rapid switching of conventional silicon-based wafers and can accurately identify non-silicon-based material wafers through continuous deep learning.

Honghu equipment has been widely used in the field of silicon-based integrated circuit manufacturing and compound semiconductors such as SiC and GaN.