Wafer Robot High Precision Handling - Bulk Rate
Wafer Robot High Precision Handling - Bulk Rate
Brand | HONGHU |
Country of Origin | China |
MOQ | 2 Units |
Price | USD 40000 / Units |
Category | Construction & Real Estate Bath & Toilet Appliances |
Contact Wafer Robot supplier for wholesale b2b price, customization or other inquiries
Supplier Info :
Honghu (Suzhou) Semiconductor Technology Co., Ltd
Jiangsu, China
Year Established: 2016
Business Type:
- Manufacturer
- Supplier
- Exporter
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Wafer Robot High Precision Handling - Bulk Rate
Wafer Robot is designed to meet the demands of high-speed, precise handling in semiconductor manufacturing. This robot features single-arm and double-arm construction options, which can be customized according to user needs.
With advanced interpolation algorithms, the robot supports VIA (Inflection point) and is compatible with multiple FOUPs, making it versatile for various applications.
Item Specifications Specifications Actual indicators
- Payload (End-effector + wafer / each wrist) 1.0kg 1.0kg 1.0kg
- Range of Motion R-axis (extension) 737 mm 755 mm 755 mm
- θ-axis (rotation) 330 deg 330 deg 330 deg
- Z-axis (elevation) 310 mm 300 mm 300 mm
- Repeatability(300 times measured) R-axis (extension) p-p 0.1mm p-p 0.1mm p-p 0.1mm
- θ-axis (rotation) p-p 0.1 deg p-p 0.1 deg p-p 0.1 deg
- Z-axis (elevation) p-p 0.1mm p-p 0.1mm p-p 0.1mm
- Maximum Speed(Acceleration/Deceleration time) R-axis (extension) 260deg/sec 260deg/sec 260deg/sec
- θ-axis (rotation) 330deg/sec 330deg/sec 330deg/sec
- Z-axis (elevation) 550mm/sec 550mm/sec 550mm/sec
- Linear motion 2000mm/s 2000mm/s 2000mm/s
- Minimum rotation diameter 600 mm 600 mm 600mm
- Path Trajectory ±1.8mm ±1.8mm ±1.65mm
- Wafer Transfer Surface (With 300mm Wafer) p-p1.0mm p-p1.0mm P-P1.0mm
Honghu atmospheric transfer module introduction
- Single-arm/double-arm construction, reversible, available on demand ;
- The interpolation algorithm supports VIA (Inflection point) and supports multiple FOUPs ;
- Full axis AC servo motor, 23bits absolute encoder ;
- S-curve acceleration and deceleration motion control technology, to achieve high-speed, high-precision handling ;
- General wafer fixing methods: vacuum adsorption, edge clamping;
- Cleanliness level: ISO Class1;
- Finger material: carbon fiber, aluminum alloy, high purity ceramics and other options;
- According to the wafer material characteristics, the optimal holding scheme is designed and provided
Users can choose from materials like carbon fiber, aluminum alloy, and high-purity ceramics for the robot’s fingers, tailored to the specific needs of the wafer material. This robot’s design incorporates these features to deliver optimal performance and reliability in wafer handling tasks.
Payment Terms: | T/T |
Packaging Info: | Wooden |
Delivery Info: | EXW |
Product Usages
The Wafer Robot is used primarily for transferring and handling wafers in semiconductor manufacturing environments. It is ideal for applications requiring high precision and speed.
The robot’s easy-to-adjust settings and various wafer fixation methods, such as vacuum adsorption and edge clamping, allow for effective handling of different wafer types. Proper installation and regular maintenance ensure the robot operates efficiently and maintains its high performance over time.
Product Keywords: Wafer Transfer Robot Transfer Module, high precision wafer robot, bulk wafer robot supplier, wholesale wafer robot price, semiconductor wafer handling robot, China wafer robot manufacturer, Wafer Robot AC servo motor, wafer robot for cleanroom, custom wafer robot solutions
Supplier Info :
Honghu (Suzhou) Semiconductor Technology Co., Ltd
Jiangsu, China
Year Established: 2016
Business Type:
- Manufacturer
- Supplier
- Exporter
Product Images
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Contact Supplier for product pricing, customization or other inquiries
Send Your Message to: Honghu (Suzhou) Semiconductor Technology Co., Ltd
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